Ocean-optics ElliCalc Bedienungsanleitung

Stöbern Sie online oder laden Sie Bedienungsanleitung nach Ausrüstung Ocean-optics ElliCalc herunter. Ocean Optics ElliCalc User Manual [en] Benutzerhandbuch

  • Herunterladen
  • Zu meinen Handbüchern hinzufügen
  • Drucken

Inhaltsverzeichnis

Seite 1 - ElliCalc

Ocean Optics Germany GmbH Thin Film Metrology

Seite 2 - CONTENTS

Ocean Optics Germany GmbH Thin Film Metrology 9 5 User modes of ElliCalc ElliCalc has two d

Seite 3

Ocean Optics Germany GmbH Thin Film Metrology 105.3 Combiversion with NanoCalc If you bought

Seite 4 - 1 Introduction

Ocean Optics Germany GmbH Thin Film Metrology 11

Seite 5 - Measurement signal

Ocean Optics Germany GmbH Thin Film Metrology 125.4 List of all menus and buttons Main menu

Seite 6 - Physical principle

Ocean Optics Germany GmbH Thin Film Metrology 136 Basic features of ElliCalc 6.1 Init

Seite 7 - Product support

Ocean Optics Germany GmbH Thin Film Metrology 14Hint: If you want to have a short check whi

Seite 8 - Getting started

Ocean Optics Germany GmbH Thin Film Metrology 156.6 Continuous mode The continuous button s

Seite 9

Ocean Optics Germany GmbH Thin Film Metrology 167 Detailed features of ElliCalc In this ch

Seite 10 - User modes of ElliCalc

Ocean Optics Germany GmbH Thin Film Metrology 17There is a section [Scout] in this layer rec

Seite 11 - Combiversion with NanoCalc

Ocean Optics Germany GmbH Thin Film Metrology 18 7.1.4 Print report This routine allows you

Seite 12

Ocean Optics Germany GmbH Thin Film Metrology 1 CONTENTS CONTENTS ...

Seite 13

Ocean Optics Germany GmbH Thin Film Metrology 197.2 Main menu “Screen” 7.2.1 Spectrometer da

Seite 14 - Basic features of ElliCalc

Ocean Optics Germany GmbH Thin Film Metrology 20You may check the value of integration time

Seite 15 - Analyze

Ocean Optics Germany GmbH Thin Film Metrology 21 If you choose this option, dark current

Seite 16 - Fitness

Ocean Optics Germany GmbH Thin Film Metrology 22The plot limits may be changed within ElliCa

Seite 17 - Main menu “File”

Ocean Optics Germany GmbH Thin Film Metrology 23If you click in the RIGHT half with your RIG

Seite 18 - Export raw data

Ocean Optics Germany GmbH Thin Film Metrology 24 You may also save these dispersion values

Seite 19 - Function keys

Ocean Optics Germany GmbH Thin Film Metrology 257.3 Main menu “Externals” 7.3.1 Mapping You

Seite 20 - PCPCPCI ⋅+⋅+⋅+=

Ocean Optics Germany GmbH Thin Film Metrology 26main menus of mapping mode 1. menu “Recipes”

Seite 21

Ocean Optics Germany GmbH Thin Film Metrology 27here you can rotate the scan region e. mapp

Seite 22

Ocean Optics Germany GmbH Thin Film Metrology 28 Stage: Ocean Optics can deliver an xy-stage

Seite 23

Ocean Optics Germany GmbH Thin Film Metrology 2 8.1.1 Change layer recipe...

Seite 24 - Dispersion

Ocean Optics Germany GmbH Thin Film Metrology 29 Data export: You may choose the following

Seite 25

Ocean Optics Germany GmbH Thin Film Metrology 30 Teach in: Teach in is an interactive tool t

Seite 26 - Main menu “Externals”

Ocean Optics Germany GmbH Thin Film Metrology 31It is possible to change any or these values

Seite 27

Ocean Optics Germany GmbH Thin Film Metrology 32If you press “write data to EXCEL-file” EXCE

Seite 28

Ocean Optics Germany GmbH Thin Film Metrology 33 load online recipe: The online setup win

Seite 29

Ocean Optics Germany GmbH Thin Film Metrology 34The setup window contains lots of input data

Seite 30

Ocean Optics Germany GmbH Thin Film Metrology 35 c. option “number of runs” You might want

Seite 31

Ocean Optics Germany GmbH Thin Film Metrology 36the text windows below the data window you s

Seite 32 - Result List

Ocean Optics Germany GmbH Thin Film Metrology 37You may open and close each virtual port sep

Seite 33 - Structure of .map-file

Ocean Optics Germany GmbH Thin Film Metrology 387.4 Main menu “Options” 7.4.1 Change butt

Seite 34

Ocean Optics Germany GmbH Thin Film Metrology 3 1 Introduction ElliCalc is an ellipsometri

Seite 35

Ocean Optics Germany GmbH Thin Film Metrology 39- show ElliCalc recipe button: to make i

Seite 36

Ocean Optics Germany GmbH Thin Film Metrology 40 First click on the layer area on the left s

Seite 37 - Structure of .onl-file

Ocean Optics Germany GmbH Thin Film Metrology 41 7.4.5 Remote control There is a very pow

Seite 38 - Vision system

Ocean Optics Germany GmbH Thin Film Metrology 427.5 Main menu “Version” This menu is visible

Seite 39 - Main menu “Options”

Ocean Optics Germany GmbH Thin Film Metrology 438 Special features for “SCOUT mode” 8.1 Main

Seite 40 - Some setups

Ocean Optics Germany GmbH Thin Film Metrology 44 SCOUT fit parameters: Changin

Seite 41 - Operator mode

Ocean Optics Germany GmbH Thin Film Metrology 459 Special features for “internal mode” This

Seite 42 - Remote control

Ocean Optics Germany GmbH Thin Film Metrology 469.1.1 General The full menu EditStructure

Seite 43 - Chart and chartdesigner

Ocean Optics Germany GmbH Thin Film Metrology 47settings of the menu EditStructureSetup and

Seite 44

Ocean Optics Germany GmbH Thin Film Metrology 489.1.6 Fixed limits If you fix a layer you fo

Seite 45 - Main menu “Screen”

Ocean Optics Germany GmbH Thin Film Metrology 4 1.1 Measurement setup A broadband white lig

Seite 46 - EditStructure button

Ocean Optics Germany GmbH Thin Film Metrology 49 9.1.11 Layer commands only available in

Seite 47 - General

Ocean Optics Germany GmbH Thin Film Metrology 50 application 3: delete a layer First sele

Seite 48 - Estimates

Ocean Optics Germany GmbH Thin Film Metrology 519.2 Main menu “Options” 9.2.1 Roughness Gene

Seite 49 - Number of layers

Ocean Optics Germany GmbH Thin Film Metrology 5210 Experimental setups and problems 10.1 Gen

Seite 50

Ocean Optics Germany GmbH Thin Film Metrology 5310.1.8 Passwords There are several passwords

Seite 51

Ocean Optics Germany GmbH Thin Film Metrology 5411 Physical explanations 11.1 Refraction ind

Seite 52

Ocean Optics Germany GmbH Thin Film Metrology 5511.3 Interference The arrangement in the pic

Seite 53

Ocean Optics Germany GmbH Thin Film Metrology 5612 Thinfilm.ini This *.ini-file has to be l

Seite 54 - Function buttons

Ocean Optics Germany GmbH Thin Film Metrology 57allows to save all spectra during mapping (t

Seite 55 - Physical explanations

Ocean Optics Germany GmbH Thin Film Metrology 58 13 APPENDIX 13.1 ElliCalc-Quick-Setup T

Seite 56 - Interference

Ocean Optics Germany GmbH Thin Film Metrology 5 1.3 Physical principle The measurement prin

Seite 57 - Thinfilm.ini

Ocean Optics Germany GmbH Thin Film Metrology 6 2 Installation ElliCalc (and SCOUT) is deli

Seite 58

Ocean Optics Germany GmbH Thin Film Metrology 7 4 Getting started After installation of you

Seite 59 - APPENDIX

Ocean Optics Germany GmbH Thin Film Metrology 8

Kommentare zu diesen Handbüchern

Keine Kommentare